En
中
P12D latest high-precision sensor, measuring range 12.7mm, resolution 0.01µm, maximum allowable error 0.6µm, repeatability 0.08µm, patented inductance capacitance composite measurement system.
Measuring rang
emm
resolution ratio
µm
Maximum allowable error
repetitive
load
N
62/5000
1) + 20%, vertical measurement 2) CF = constant measuring force 3) LF = low measuring force 4) vacuum lifting device 5) Data line 90 degrees
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