Nano - scale air - float positioning motion system
Nano - scale air - float positioning motion system

With marble platform as the base, the air floating positioning motion device uses air floating guide rail and motor control technology, and the maximum measuring range can reach 0-5m (any length can be customized) with laser interferometer. The positioning accuracy can reach 10nm in the case of slow motion, which is widely used in the product testing of national defense and aerospace industry. When the positioning accuracy is 2µm, the linear motor control air float motion, the maximum speed can reach 5m/s, equipped with the corresponding measurement software to control the machine, convenient measurement, a wide range of uses.

  • Product parameters
  • 适用范围
  • 产品描述
  • 参数配置

Technical characteristics


● Air lubrication is between the guide surfaces, so the friction coefficient is very small.


● Minimal wear of the guide rail, long service life of the instrument, can ensure the accuracy of the system for a long time.


● The air film has the effect of error homogenization, which can improve the movement accuracy of the guide rail.


● Film thickness is almost not affected by speed, even at very low speed will not creep, smooth movement.


● Almost no heat generated, no viscosity change, no need to add cooling measures.

野齿仪器-纳米级气浮定位运动系统

野齿仪器-纳米级气浮定位运动系统


model
Nano - scale air - float positioning motion system
Measuring way
Direct measurement
Measuring rangemm0-5000 (customized arbitrary length)
Accuracy of measurementμmSlow motion: 0.5+L(mm)/500
Accuracy of measurementμmFast movement: 2+L(mm)/500
The resolution of theμm0.1
Measurement system
Using Renishaw high precision grating ruler
Movement speed
Up to 5m/s
Environmental requirements
Temperature 20 plus or minus 2 ℃; Humidity of 50% plus or minus 5%;
Air pressure
0.4 - 0.6 Mpa


With marble platform as the base, the air floating positioning motion device uses air floating guide rail and motor control technology, and the maximum measuring range can reach 0-5m (any length can be customized) with laser interferometer. The positioning accuracy can reach 10nm in the case of slow motion, which is widely used in the product testing of national defense and aerospace industry. When the positioning accuracy is 2µm, the linear motor control air float motion, the maximum speed can reach 5m/s, equipped with the corresponding measurement software to control the machine, convenient measurement, a wide range of uses.

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